Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope by Huiliang Cao

Author:Huiliang Cao
Language: eng
Format: epub
ISBN: 9789811992476
Publisher: Springer Nature Singapore

In the figure, βQxL and βQxR are the included angles of quadrature errors of the left and right mass blocks respectively. VsL and VsR are output signals of left and right mass preamplifiers respectively. Left—right drive and detection frame to the direction of motion. It can be seen that the Vstotal signal is the superposition of the two mass blocks’ respective output differential signals, which can greatly eliminate the common mode error. For the convenience of analysis, kx and ky are split into kxL and kxR, kyL and kyR, which are the stiffness of the left and right mass blocks along the x and y directions respectively. According to Eq. (4.5), the quadrature signal components in VsL and VsR can be written:

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